Chemical-Mechanical Polish ( CMP)-A process of flattening and polishing wafers that utilizes both chemical removal and mechanical buffing. 化学-机械抛光(CMP)-平整和抛光晶圆片的工艺,采用化学移除和机械抛光两种方式。
Mechanical Analysis of Novel Buffing Machine Type LP& 1000 and Manufacturing process of Buffing die 新型抛光机LP&1000的机理分析与抛光模制作工艺